Research on the key technology of LTCC pressure sensor
نویسندگان
چکیده
منابع مشابه
Integrated SMD pressure / flow / temperature multisensor for compressed air in LTCC technology: Thermal flow sensor
In this work, we present and analyse the flow-sensing part of a recently-developed multisensor in LTCC (lowtemperature co-fired ceramic) technology; this device integrates flow / pressure / temperature sensing and is designed for diagnostics monitoring of standard industrial compressed air circuits and devices such as valves and actuators. In this prototype, flow is sensed using the constant-te...
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ژورنال
عنوان ژورنال: Photonic Sensors
سال: 2015
ISSN: 1674-9251,2190-7439
DOI: 10.1007/s13320-015-0243-2